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POSIFA Microsystems Inc

1925 Zanker Road,
San Jose, CA 95112
USA
Tel: 1-650-646-5788
Fax: 1-866-213-8603
Email: info@posifamicrosystems.com

  

European Distributor

BS-rep GmbH
Eichertstr. 68, D-56745 Weibern, Germany

Tel: +49 (0) 2655 / 96 26 476
Email: info@sensor-rep.de 

  

  

 

PVC1000 (10-3 to 30 Torr)

The PVC1000 series of MEMS Pirani Vacuum Sensors offer a breakthrough vacuum measurement solution that enhances miniaturization while delivering ultra-low power consumption, long lifetime, minimal field maintenance, and low cost.

PVC1000 Series Datasheet

Part Number Spec Price
PVC1001

10-3 to 30 Torr; TO5 metal can package

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PVC1002

10-3 to 30 Torr; Bare die

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PVC1003

10-3 to 30 Torr; Threaded package

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  • Features
  • Applications
  • Specs
  • Resources
  • Ultra low power consumption  < 5 mW
  • Fast Response Time  < 5 mSec
  • Shock Resistance to 1,000g
  • Suitable for gas volume as low as 0.1 cm3
  • Low Noise
  • High Resolution
  • On-chip temperature sensing
  • Long Term Stability
  • Can be cleaned by immersing in solvent, prolonging useful life
  • Analytical instruments
  • Leak detection in any closed system maintained under primary vacuum
  • Semiconductor equipment
  • Vacuum packing machines
  • Portable digital vacuum gauges
  • Small mechanical systems (e.g. pumping) to achieve specified vacuum levels
  • Low cost vacuum switches to verify vacuum below 1 torr
ELECTRICAL CHARACTERISTICS
   
   
  Test Conditions: Heating Current = 7 mA, Ta=25°C
PARAMETERS PVC1001   CONDITIONS
MIN TYP MAX UNIT
Range  10-3   30 Torr  
Resolution1   0.25   Torr 5-30 Torr
  0.05   Torr 2 to 5 Torr
  0.005   Torr 10-3 to 2 Torr
Accuracy1   ±10   % reading > 5 Torr
  ±5   % reading < 5 Torr
Measurement Resistor2  110 130  150  Ohm  At 25°C
Reference Resistor2 210 260 300  Ohm  At 25°C
Resistor TCR   0.0025    /°K  
Humidity 0   100 % RH, Non-condensing
Heating Current    7 7.4 mA  
Operating Temperature Range -40   85 °C  
Power Consumption     5 mW 10-3 to 30 Torr
Shock Resistance     1000 g  
Overpressure     27.5 Bar  
Measurable Gas Volumes   0.1   cm3  
Response Time   5   mSec  
Notes:
1. For reference only.  Actual resolution/accuracy depends on the associated circuit.
2. Tighter resistance ranges are also available.
 
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