MEMS Sensor Dies
Thermal Flow Sensor Die
Thermal Conductivity Sensor Die
OEM Development Support

POSIFA Microsystems Inc

1925 Zanker Road,
San Jose, CA 95112
Tel: 1-650-646-5788


European Distributor

BS-rep GmbH
Am Liesenfeld 23, D-41812 Erkelenz Germany

Tel: +49 (0) 2431 9482-17




Thermal Conductivity Sensor Die

The PTCD10 Thermal Conductivity Gas Sensor Die measures thermal conductivity (ability to conduct heat) of the surrounding gas. Operating on the principle that gases differ in their thermal conductivity, it can be used to measure gas concentration in binary mixture or quasi-binary mixture (e.g. H2, CH4 or CO2 in air) where component gases have different thermal conductivity.

It can also be used as a Pirani sensor to measure pressure in vacuum systems.

Date Sheet: PTCD10 Thermal Conductivity Gas Sensor Die

  • Features
  • Applications
  • Specs
  • Resources
  • Extremely low power consumption
  • Operate in high temperature environment
  • Very stable long term operation
  • Minimal field maintenance required
  • Small footprint: 1.8 x 1.4 mm
  • Replace traditional TCD (thermal conductivity detector) in gas chromatography (GC) systems and gas analyzers
  • Leak detection for Natural Gas (CH4), Hydrogen (H2), and refrigerant gases
  • Natural gas quality control
  • Natural gas engine combustion control
  • Fuel cell applications
  • Carbon Dioxide (CO2) monitoring for Indoor Air Quality (IAQ)
  • Methane (CH4) detection for mining safety
  • Pirani vacuum gauge
Electrical Characteristics
Measurement Resistor (@25°C) 135 150 165 Ω
Reference Resistor (@25°C) 270 300 330 Ω
Reference Resistor TCR (0°C to 200°C)   0.0025   / oK
PTCD10 Test Results*
Gas being sensed in air Range of concentration PTCD10 Precision
Hydrogen H2 0-3% 170 ppm
Carbon Dioxide CO2 0-5% 1500 ppm
Methane CH4 0-40% 1000 ppm
Die Dimensions      
Length   1.8    mm
Width 1.35  1.4 1.46 mm
Thickness 0.5   0.55 mm
Pad Size   100 x 120   µm
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