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POSIFA Microsystems Inc
1925 Zanker Road,
San Jose, CA 95112
USA
Tel: 1-650-646-5788
Fax: 1-866-213-8603
Email: info@posifamicrosystems.com
European Distributor
BS-rep GmbH
Eichertstr. 68, D-56745 Weibern, Germany
Tel: +49 (0) 2655 / 96 26 476
Email: info@sensor-rep.de
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| Home » Mems Sensor Dies » Thermal Flow Sensor Die |
Thermal Flow Sensor Die
The PTFD10 Thermal Flow Sensor Die measures the flow of a liquid or gaseous medium across the surface of the die using the Thermo-transfer (Calorimetric) principle. It provides the sensing core for a wide range of air flow applications such as mass air flow sensors, air mass meters for engine air-intake control, air velocity sensors, thermal differential pressure sensors.
Additionally due to its innovative, robust microstructure, PTFD10 is uniquely suited for liquid flow applications such as diesel fuel meters and disposable liquid micro-flow sensors for medical devices.
Date Sheet: PTFD10 Thermal Flow Sensor Die
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- Features
- Applications
- Specs
- Resources
- Suitable for liquid flow, gas flow and differential pressure applications
- Sensitive at extremely low flow rates and differential pressure levels
- Minimal zero drift
- Fast response
- Resistant to vibration and pressure shock
- Resistant to corrosive gases and liquids and other surface contamination (e.g. clogging caused by particles)
- Simple signal conditioning circuits
- Mass flow, differential pressure, and air velocity monitoring in HVAC
- Air-mass meter (MAF) in engine air-intake control
- Medical respirators and ventilators
- Diesel flow sensors for generator/engine fuel consumption monitoring
- Liquid flow sensors for insulin pumps and micro-infusion pumps
| Performance Specifications |
| PARAMETER |
MIN |
TYP |
MAX |
UNIT |
| Heater Resistor |
2,670 |
2,740 |
2,860 |
Ω |
| Reference Resistor |
7,209 |
7,398 |
7,722 |
Ω |
| Reference Resistor TCR |
|
-578 |
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ppm / oC |
| Heater Current (Constant Current) |
|
6 |
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mA |
| Upstream Thermopile Output (in Air, 25oC) |
157 |
165 |
177 |
mV |
| Downstream Thermopile Output (in Air, 25oC) |
157 |
165 |
177 |
mV |
| Thermopile Resistance (25oC) |
60 |
62 |
65 |
KΩ |
| Response Time |
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8 |
ms |
| Null Drift (Full Scale) |
|
0.2 |
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%/Year |
| Operating Temperature |
-40 |
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125 |
oC |
| Overpressure |
15 |
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bar |
| 217 |
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psi |
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| Die Dimensions |
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| PARAMETERS |
MIN |
TYP |
MAX |
UNIT |
| Die Length |
4.394 |
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4.504 |
mm |
| Die Width |
1.35 |
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1.46 |
mm |
| Die Thickness |
0.5 |
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0.55 |
mm |
| Pad Size |
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80 x 120 |
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µm |
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